Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis
نویسندگان
چکیده
منابع مشابه
Design Study of Piezoelectric Micro-machined Mechanically Coupled Cantilever Filters using a Combined Finite Element and Microwave Circuit Analysis
A new mechanical filter structure is presented which comprises two silicon cantilevers mechanically coupled by a silicon linkage with thin film piezoelectric transducers providing electrical input and output signals. The resonance behaviour of such a structure results in a bandpass filter response, having a band-width determined by the frequency separation between the closely spaced in-phase an...
متن کاملUsing Finite Element Analysis and Experimental Analysis on Vibration of a Piezoelectric Micro Pump
Due to the rise of biological and MEMS technology in recent years, some micro flow system components have drawn attention and been developed by many investigators. The importance of micro-pumps manufactured is higher than the other part of micro flow system since it is the power source of the entire micro-flow system and responsible for driving working fluid in the microfluidic system. In actua...
متن کاملFinite Element Analysis of Functionally Graded Piezoelectric Beams
In this paper, the static bending, free vibration, and dynamic response of functionally graded piezoelectric beams have been carried out by finite element methodunder different sets of mechanical, thermal, and electrical loadings. The beam with functionally graded piezoelectric material (FGPM) is assumed to be graded across the thickness with a simple power law distributio...
متن کاملElectric Circuit Analysis using Finite Element Modeling
Electric circuit analysis determines the voltage and current distribution in an electric circuit due to applied source voltages or currents. In a static (DC) electric circuit analysis, the voltage and current distribution in an electric circuit is determined that is subjected to applied DC source voltages or currents. In a harmonic (AC) electric circuit analysis, the voltage and current distrib...
متن کاملExperiment and Simulation Validated Analytical Equivalent Circuit Model for Piezoelectric Micro-Machined Ultrasonic Transducer
An analytical Mason equivalent circuit is derived for a circular, clamped plate piezoelectric micro-machined ultrasonic transducer (pMUT) design in 31 mode considering an arbitrary electrode configuration at any axisymmetric vibration mode. The explicit definition of lumped parameters based entirely on geometry, material properties and defined constants enables straightforward and wide ranging ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2006
ISSN: 0924-4247
DOI: 10.1016/j.sna.2005.10.027